In Situ Transmission Electron Microscopy Observations of Forward Bias Degradation of Vertical Geometry β-Ga2O3 Rectifiers

Abstract

The microstructural changes and degradation under forward bias of vertical β-Ga2O3 rectifiers were observed by in-situ transmission electron microscopy. The devices show both a voltage dependence for the onset of visible degradation as well as a time dependence at this threshold voltage, suggesting a defect percolation process is occurring. The degraded rectifiers show a large decrease in forward current and different types of crystal defects are present, including stacking fault tetrahedra, microcracks, Ga-rich droplets and Au inclusions from the top electrode. Continued forward bias stressing is known to lead to macro-cracks oriented along the [010] crystal orientation and eventual delamination of the epitaxial drift layer, but this study is the first to provide insight into the appearance of the smaller defects that precede the large scale mechanical failure of the rectifiers. The initial stages of bias stressing also produce an increase in deep trap states near EC−1.2 eV.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 06, 2020
Source ID
10.1149/2162-8777/ab981d

Entities

People

  • A. Y. Polyakov
  • Aman Haque
  • Fan Ren
  • Marko J. Tadjer
  • Minghan Xian
  • Nicholas R Glavin
  • Stephen Pearton
  • Zahabul Islam
  • А. I. Kochkova

Organizations

  • Defense Threat Reduction Agency
  • National Science Foundation
  • Office of Naval Research
  • Russian Science Foundation

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Structural Health Monitoring of Composite Structures.

Technology Areas

  • Microelectronics