Heteroepitaxial Growth of Ga2O3 Thin Films of Various Phase Composition by Oxidation of Ga in Hydrogen-Oxygen Plasmas

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2021
Source ID
10.1149/2162-8777/ac0e11

Entities

People

  • A. Y. Polyakov
  • Igor Prokhorov
  • Ilya Vorotuntsev
  • Leonid Mochalov
  • Mikhail Kudryashov
  • Pavel Yunin
  • Stephen Pearton
  • Tatiana Sazanova
  • Victoria Pryakhina
  • Vladimir Malyshev

Organizations

  • Defense Threat Reduction Agency
  • National Science Foundation
  • Russian Science Foundation