(Invited) Growth and Characterization of α-, β-, and ε-Ga2O3 Epitaxial Layers on Sapphire
Abstract
Increasing global demand for energy makes urgent the need for highly efficient electronics for energy conversion and transport. Power electronics are required for electrical switching within the electrical grid and for green modes of transportation such as the in-switched-mode power supplies now used for hybrid electric vehicles. Silicon devices have been traditionally used for power electronics. However, wide bandgap semiconductors are much more efficient and thus more useful for future energy applications, because they can withstand higher electric fields with less material and reduced energy loss. As an example, Toyota recently began trials of a new hybrid system using power electronics based on SiC and claims that power electronic devices based on SiC could increase fuel efficiency of hybrid vehicles by 10%. Almost all high-power electronic devices are fabricated in very thick films grown on low defect density semi-insulating substrates of the same composition and crystal structure. At present, 4H-SiC is the material of choice for both substrates and films for devices operating at and above 1200 volts. The upper limits of operation for power devices fabricated in GaN-based films are markedly lower. And the substrates of both materials are highly textured polycrystalline materials and still very expensive. A very promising alternative to SiC and GaN is gallium oxide, Ga2O3, which has an even larger bandgap than the former two materials. The availability of this material presents new possibilities for disruptive devices and technologies that could translate to even greater energy efficiencies at lower cost than predicted for SiC and GaN.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 01, 2017
- Source ID
- 10.1149/ma2017-02/31/1339
Entities
People
- Gary S. Tompa
- Johanne A. Rokholt
- Lisa M. Porter
- Luke A. M. Lyle
- Nick Sbrockey
- Robert F Davis
- Serdal Okur
- Tom Salagaj
- Yao Yao