Fabrication of size scalable three-dimensional photonic structures via dual-beam multiple exposure and its robustness study

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 05, 2010
Source ID
10.1364/josab.27.002534

Entities

People

  • Guanquan Liang
  • Shih-chieh Cheng
  • Shu Yang
  • Xuelian Zhu
  • Yongan Xu

Organizations

  • Office of Naval Research