Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 25, 2012
Source ID
10.1364/josab.29.000a55

Entities

People

  • Andrew Homyk
  • Antti Säynätjoki
  • Ari Tervonen
  • Axel Scherer
  • Benjamin C. Richards
  • Galina Khitrova
  • Hyatt M. Gibbs
  • J. D. Olitzky
  • Joshua R Hendrickson
  • Ju-Young Kim
  • Lasse Karvonen
  • Michael Gehl
  • Ricky Gibson
  • Sander Zandbergen
  • Seppo Honkanen
  • Tapani Alasaarela
  • Yong-hee Lee

Organizations

  • Air Force Office of Scientific Research
  • Finnish Foundation for Technology Promotion
  • Research Council of Finland