Overcoming Si_3N_4 film stress limitations for high quality factor ring resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 20, 2013
Source ID
10.1364/oe.21.022829

Entities

People

  • Avik Dutt
  • Carl B. Poitras
  • Kevin Luke
  • Michal Lipson

Organizations

  • Air Force Office of Scientific Research
  • Defense Advanced Research Projects Agency