Barrier-free absorbance modulation for super-resolution optical lithography

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 30, 2015
Source ID
10.1364/oe.23.012244

Entities

People

  • Apratim Majumder
  • Benjamin Pollock
  • Farhana Masid
  • Rajesh Menon
  • Trisha L Andrew

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation