Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 06, 2015
Source ID
10.1364/oe.23.021334

Entities

People

  • Binbin Guan
  • Guangyao Liu
  • Kuanping Shang
  • S. J. Ben Yoo
  • Shibnath Pathak

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation