Sub-bandgap polysilicon photodetector in zero-change CMOS process for telecommunication wavelength

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 10, 2015
Source ID
10.1364/oe.23.032643

Entities

People

  • Amir Atabaki
  • Huaiyu Meng
  • Jason S. Orcutt
  • Rajeev J. Ram

Organizations

  • Defense Advanced Research Projects Agency