Efficient analysis of deep high-index-contrast gratings under arbitrary illumination
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 18, 2015
- Source ID
- 10.1364/oe.23.033472
Entities
People
- Amir Shlivinski
- Joseph E. Ford
- Nojan Motamedi
- Vitaliy Lomakin
Organizations
- Defense Advanced Research Projects Agency