Hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total reflection mirrors
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 17, 2017
- Source ID
- 10.1364/oe.25.009521
Entities
People
- Guangyao Liu
- Jizhao Zang
- Joe C. Campbell
- Kuanping Shang
- S. J. Ben Yoo
- Shaoqi Feng
- Siwei Li
- Tiehui Su
- Weicheng Lai
- Xiaojun Xie
- Yang Shen
Organizations
- Defense Advanced Research Projects Agency