High-Q-factor Al2O3 micro-trench cavities integrated with silicon nitride waveguides on silicon

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 16, 2018
Source ID
10.1364/oe.26.011161

Entities

People

  • Douglas Coolbaugh
  • E. Salih Magden
  • Gerald Leake
  • Henry C. Frankis
  • Jonathan D. B. Bradley
  • Michael. R. Watts
  • Thomas N. Adam
  • Zhan Su

Organizations

  • Defense Advanced Research Projects Agency
  • Natural Sciences and Engineering Research Council