High positional freedom SOI subwavelength grating coupler (SWG) for 300 mm foundry fabrication
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 22, 2018
- Source ID
- 10.1364/oe.26.028773
Entities
People
- Douglas D. Coolbaugh
- Eng Wen Ong
- Nicholas M. Fahrenkopf
- Thomas Wallner
Organizations
- Air Force Research Laboratory