Curved waveguides in silicon written by a shaped laser beam
Abstract
We demonstrate, for the first time, the direct writing of curved optical waveguides in monocrystalline silicon with curve radii from 2 mm to 6 cm. The bending loss of the curved waveguides is measured and a good agreement with theoretical values is found. Raman spectroscopy measurements suggest the formation of inhomogeneous amorphous and polycrystalline phases in the laser-modified region. This direct laser-writing method may advance fabrication capabilities for integrated 3D silicon photonic devices.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 26, 2021
- Source ID
- 10.1364/oe.419074
Entities
People
- Brice Lacroix
- Matthew J. Berg
- Pingping Chen
- Sasan Fathpour
- Shuting Lei
- Xiaoming Yu
- Xinya Wang
Organizations
- Air Force Office of Scientific Research
- Kansas State University
- National Science Foundation
- University of Central Florida