Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors
Abstract
We demonstrate calibration and operation of a Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors for polarization state generation and analysis. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick titanium layers on quartz substrates. The first mirror acts as polarization state image generator and the second mirror acts as polarization state image detector. The instrument is calibrated using samples consisting of laterally homogeneous properties such as straight-through-air, a clear aperture linear polarizer, and a clear aperture linear retarder waveplate. Mueller matrix images are determined for spatially varying anisotropic samples consisting of a commercially available (Thorlabs) birefringent resolution target and a spatially patterned titanium slanted columnar thin film deposited onto a glass substrate. Calibration and operation are demonstrated at a single wavelength (530 nm) only, while, in principle, the instrument can operate regardless of wavelength. We refer to this imaging ellipsometry configuration as rotating-anisotropic-mirror-sample-rotating-anisotropic-mirror ellipsometry (RAM-S-RAM-E).
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 20, 2021
- Source ID
- 10.1364/oe.435972
Entities
People
- Alexander Ruder
- Brandon Wright
- Craig M. Herzinger
- Eva Schubert
- Mathias Schubert
- Matthew Hilfiker
- Rene Feder
- Ufuk Kılıç
Organizations
- Air Force Office of Scientific Research
- Fraunhofer Institute for Microstructure of Materials and Systems
- Knut and Alice Wallenberg Foundation
- Leibniz Institute for Polymer Research
- Linköping University
- National Science Foundation
- University of Nebraska–Lincoln