On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators
Abstract
We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 µm. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced 1.5 dB/cm higher propagation losses at 3.6 µm due to C-H bond absorption. We use fabricated waveguides to detect an aromatic aldehyde dissolved in a non-polar solvent with a limit of detection of 1.09 µmol/mL. We then reduce this detection limit to 0.25 µmol/mL using the enhancement produced by a chalcogenide ring resonator.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 03, 2023
- Source ID
- 10.1364/oe.476186
Entities
People
- Bo Xu
- Dag Hjelme
- Greg Krueper
- Juliet T. Gopinath
- Michael Grayson
- Mo Zohrabi
- Wounjhang Park
Organizations
- Air Force Office of Scientific Research
- Norwegian University of Science and Technology
- Office of Naval Research
- United States Department of Education
- University of Colorado Boulder