Silicon-nitride surface passivation of submicrometer silicon waveguides for low-power optical switches

Document Details

Document Type
Pub Defense Publication
Publication Date
May 08, 2009
Source ID
10.1364/ol.34.001534

Entities

People

  • Joris Van Campenhout
  • Richard M. Osgood
  • Solomon Assefa
  • William M. J. Green
  • Xiaoping Liu
  • Yurii A. Vlasov

Organizations

  • Defense Advanced Research Projects Agency