Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 29, 2010
Source ID
10.1364/ol.35.001013

Entities

People

  • Joris Van Campenhout
  • Solomon Assefa
  • William M. J. Green
  • Yurii A. Vlasov

Organizations

  • Defense Advanced Research Projects Agency