Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2011
Source ID
10.1364/ol.36.000421

Entities

People

  • Marko Loncar
  • Mughees Khan
  • Murray W. Mccutcheon
  • Parag B. Deotare
  • Thomas Babinec

Organizations

  • National Science Foundation