Tunable two-mirror interference lithography system for wafer-scale nanopatterning

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 11, 2011
Source ID
10.1364/ol.36.003176

Entities

People

  • Chang-Hwan Choi
  • Ishan Wathuthanthri
  • Weidong Mao

Organizations

  • American Chemical Society Petroleum Research Fund
  • Defense Advanced Research Projects Agency
  • National Science Foundation