Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber

Document Details

Document Type
Pub Defense Publication
Publication Date
May 21, 2012
Source ID
10.1364/ol.37.001886

Entities

People

  • Brian Kearney
  • Dragoslav Grbovic
  • Fabio Alves
  • Gamani Karunasiri

Organizations

  • Office of Basic Energy Sciences
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems