High-quality crystallinity controlled ALD TiO_2 for waveguiding applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 02, 2013
Source ID
10.1364/ol.38.003980

Entities

People

  • Antti Säynätjoki
  • Harri Lipsanen
  • Henri Jussila
  • Ilkka Tittonen
  • Khanh Kieu
  • Lasse Karvonen
  • Nasser Peyghambarian
  • Robert A. Norwood
  • Soroush Mehravar
  • Tapani Alasaarela

Organizations

  • Research Council of Finland