High-quality crystallinity controlled ALD TiO_2 for waveguiding applications
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 02, 2013
- Source ID
- 10.1364/ol.38.003980
Entities
People
- Antti Säynätjoki
- Harri Lipsanen
- Henri Jussila
- Ilkka Tittonen
- Khanh Kieu
- Lasse Karvonen
- Nasser Peyghambarian
- Robert A. Norwood
- Soroush Mehravar
- Tapani Alasaarela
Organizations
- Research Council of Finland