Polycrystalline silicon ring resonator photodiodes in a bulk complementary metal-oxide-semiconductor process

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 14, 2014
Source ID
10.1364/ol.39.001061

Entities

People

  • Jason S. Orcutt
  • Jeffrey M. Shainline
  • Karan K. Mehta
  • Milos A Popovic
  • Ofer Tehar-zahav
  • Rajeev J. Ram
  • Roy Meade
  • Zvi Sternberg

Organizations

  • Defense Advanced Research Projects Agency

Tags

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene