Mueller matrix ellipsometer using dual continuously rotating anisotropic mirrors

Abstract

We demonstrate calibration and operation of a single wavelength (660 nm) Mueller matrix ellipsometer in normal transmission configuration using dual continuously rotating anisotropic mirrors. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick gold layers on glass substrates. Upon rotation around the mirror normal axis, sufficient modulation of the Stokes parameters of light reflected at oblique angle of incidence is achieved. Thereby, the mirrors can be used as a polarization state generator and polarization state analyzer in a generalized ellipsometry instrument. A Fourier expansion approach is found sufficient to render and calibrate the effects of the mirror rotations onto the polarized light train within the ellipsometer. The Mueller matrix elements of a set of anisotropic samples consisting of a linear polarizer and a linear retarder are measured and compared with model data, and very good agreement is observed.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 24, 2020
Source ID
10.1364/ol.398060

Entities

People

  • Alexander Ruder
  • Brandon Wright
  • Craig M. Herzinger
  • Darin Peev
  • Eva Schubert
  • Mathias Schubert
  • Matthew Hilfiker
  • Rene Feder
  • Ufuk Kılıç

Organizations

  • Air Force Office of Scientific Research
  • German Research Foundation
  • Knut and Alice Wallenberg Foundation
  • National Science Foundation

Tags

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene