Deep-UV microsphere projection lithography

Document Details

Document Type
Pub Defense Publication
Publication Date
May 21, 2015
Source ID
10.1364/ol.40.002537

Entities

People

  • Alireza Bonakdar
  • Eric Dexheimer
  • Hooman Mohseni
  • Mohsen Rezaei
  • Robert L. Brown
  • Sung Jun Jang
  • Vala Fathipour

Organizations

  • Army Research Office
  • National Science Foundation
  • Northwestern University