Robust postfabrication trimming of ultracompact resonators on silicon on insulator with relaxed requirements on resolution and alignment

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 28, 2015
Source ID
10.1364/ol.40.004476

Entities

People

  • Ali Adibi
  • Ali. A. Eftekhar
  • Amir H. Atabaki
  • Murtaza Askari
  • Payam Alipour

Organizations

  • Air Force Office of Scientific Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems