Robust postfabrication trimming of ultracompact resonators on silicon on insulator with relaxed requirements on resolution and alignment
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 28, 2015
- Source ID
- 10.1364/ol.40.004476
Entities
People
- Ali Adibi
- Ali. A. Eftekhar
- Amir H. Atabaki
- Murtaza Askari
- Payam Alipour
Organizations
- Air Force Office of Scientific Research