High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 19, 2015
Source ID
10.1364/ol.40.005502

Entities

People

  • C. Dorrer
  • C. Farrell
  • D. T. Reid
  • K. L. Marshall
  • M. Rutkauskas
  • P. Vedagarbha
  • T. R. Lundquist

Organizations

  • Intelligence Advanced Research Projects Activity
  • New York State Energy Research and Development Authority
  • United States Department of Energy
  • University of Rochester