Ptychographic imaging with a compact gas–discharge plasma extreme ultraviolet light source

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 24, 2015
Source ID
10.1364/ol.40.005574

Entities

People

  • D. Rudolf
  • J. Bussmann
  • Jianwei Miao
  • L. Juschkin
  • M. Odstrcil
  • R. Bresenitz
  • W. S. Brocklesby

Organizations

  • Defense Advanced Research Projects Agency