Low helium permeation cells for atomic microsystems technology

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 09, 2016
Source ID
10.1364/ol.41.002775

Entities

People

  • Argyrios T. Dellis
  • Elizabeth A. Donley
  • John E. Kitching
  • Svenja Knappe
  • Vishal Shah

Organizations

  • National Institute of Standards and Technology