Planar GeSn lateral p-i-n resonant-cavity-enhanced photodetectors for short-wave infrared integrated photonics

Abstract

We report normal-incidence planar GeSn resonant-cavity-enhanced photodetectors (RCE-PDs) with a lateral p - i - n homojunction configuration on a silicon-on-insulator (SOI) platform for short-wave infrared (SWIR) integrated photonics. The buried oxide of the SOI platform and the deposited S i O 2 layer serve as the bottom and top reflectors, respectively, creating a vertical cavity for enhancing the optical responsivity. The planar p - i - n diode structure is favorable for complementary-metal-oxide-semiconductor-compatible, large-scale integration. With the bandgap reduction enabled by the 4.2% Sn incorporation into the GeSn active layer, the photodetection range extends to 1960 nm. The promising results demonstrate that the developed planar GeSn RCE-PDs are potential candidates for SWIR integrated photonics.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2021
Source ID
10.1364/ol.427529

Entities

People

  • Chen-yang Chang
  • Greg Sun
  • Guo-En Chang
  • H. H. Cheng
  • Kuo-chih Lee
  • Radhika Bansal
  • Richard Soref

Organizations

  • Air Force Office of Scientific Research
  • National Chung Cheng University
  • National Science and Technology Council
  • National Taiwan University
  • University of Massachusetts Boston

Tags

Fields of Study

  • Materials science

Readers

  • Distributed Systems and Data Platform Development
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics