Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride
Abstract
The design, fabrication, and characterization of low-loss ultra-compact bends in high-index ( n = 3.1 at λ = 1550 n m ) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of 65 × 65 µ m 2 , having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of 8 m W / π and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 14, 2021
- Source ID
- 10.1364/ol.431757
Entities
People
- Hani Nejadriahi
- Paul K. L. Yu
- Steve Pappert
- Yeshaiahu Fainman
Organizations
- National Science Foundation
- Office of Naval Research
- Office of Science
- University of California, San Diego