Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride
Abstract
The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength of 1525 nm. A beam width of 6.3° has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity [negligible two-photon absorption (TPA)], wide transparency window, and CMOS compatibility.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 31, 2023
- Source ID
- 10.1364/ol.476819
Entities
People
- Hani Nejadriahi
- Karl Johnson
- Paul K. L. Yu
- Prabhav Gaur
- Steve Pappert
- Yeshaiahu Fainman
Organizations
- National Science Foundation
- Office of Naval Research
- United States Department of Energy
- University of California, San Diego