Exploring microstructural variations in highly transparent AlN/SiO2 nano multilayers
Abstract
The microstructure of optically optimized transparent AlN/SiO2 nano multilayers were investigated and compared with baseline repeated bilayer configurations. The multilayered films were synthesized by magnetron sputtering and characterized by transmission electron microscopy and spectrophotometry with multifunctional behavior evaluated by nanoindentation and residual stress analysis. The optically optimized AlN/SiO2 multilayers exhibit higher transmittance (%T300-800nm≈95%), distinct crystalline/amorphous interfaces, and changes in the grain morphology as compared to the periodic baseline samples (%T300-800nm≈70-80%). Varying both layer thickness and layer ratio to maximize transparency showed a significant impact on microstructure and interface character.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 02, 2020
- Source ID
- 10.1364/ome.389156
Entities
People
- Andrea M. Hodge
- Chelsea D. Appleget
Organizations
- National Aeronautics and Space Administration
- Office of Naval Research