Ablating nanoscale pores in crystalline quartz using laser-induced micro-plasmas in tri-layer structures
Abstract
We demonstrate a novel approach for achieving rapid, consistent, and controllable micro-pore fabrication in single-crystalline quartz. These micro-pores are essential for applications in biology, i.e., studying ion channels in general and mechano-sensitive channels (MSC) in particular. The fabrication process consists of direct material ablation using pulsed UV light from a 193 nm excimer laser. These pulses ablate single-crystalline quartz chips by burning a laser-induced plasma in a tri-layer structure. Controllable plasma confinement and thus pore size is achieved by sandwiching a thin layer of a selected organic solution between the quartz chip and different substrates. This solution causes the confined micro-plasma to generate special ablation conditions, to create uniformly sized and shaped nanopores.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 27, 2020
- Source ID
- 10.1364/ome.395494
Entities
People
- Eric Stava
- Hyun-cheol Shin
- Jon Rodriguez
- José R. Sánchez Pérez
- Max G. Lagally
- Minrui Yu
- Paul V. Gwozdz
- Robert H Blick
Organizations
- Defense Advanced Research Projects Agency
- German Research Foundation
- National Science Foundation
- United States Department of Energy