Laser-induced patterning for a diffraction grating using the phase change material of Ge2Sb2Te5 (GST) as a spatial light modulator in X-ray optics: a proof of concept
Abstract
The proposed X-ray spatial light modulator (SLM) concept is based on the difference of X-ray scattering from amorphous and crystalline regions of phase change materials (PCMs) such as Ge2Sb2Te5 (GST). In our X-ray SLM design, the “on” and “off” states correspond to a patterned and homogeneous state of a GST thin film, respectively. The patterned state is obtained by exposing the homogeneous film to laser pulses. In this paper, we present patterning results in GST thin films characterized by microwave impedance microscopy and X-ray small-angle scattering at the Stanford Synchrotron Radiation Lightsource.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 09, 2022
- Source ID
- 10.1364/ome.451534
Entities
People
- Aaron M Lindenberg
- Anne Sakdinawat
- Chieh Chang
- Christopher J. Tassone
- Douglas Van Campen
- Edwin Ng
- H-S Philip Wong
- Hideo Mabuchi
- Jeongwon Park
- Peter Zalden
- Scott Johnston
- Scott W. Fong
- Walter Mok
- Zhi-Xun Shen
Organizations
- Defense Advanced Research Projects Agency
- European XFEL
- Gordon and Betty Moore Foundation
- National Science Foundation
- Office of Basic Energy Sciences
- SLAC National Accelerator Laboratory
- Stanford University
- University of Nevada, Reno
- University of Ottawa