Phase modulation using a titanium dioxide strip on lithium niobate

Abstract

In this manuscript, we demonstrate the first phase modulator using titanium dioxide as a strip loaded waveguide on thin-film lithium niobate. The amorphous titanium dioxide was fabricated using RF reactive sputtering followed by a dielectric lift-off process. Two gold electrodes were deposited next to the waveguide by using the same process. This process eliminates the need for plasma etching or high-temperature vapor deposition methods, opening the door to fabrication on sensitive material systems. A propagation loss of 0.156 dB/mm and V π of 3.2 V at 1550 nm were experimentally measured and reported.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2022
Source ID
10.1364/ome.465698

Entities

People

  • Andrew J. Mercante
  • Benjamin Shopp
  • Dennis W. Prather
  • Peng Yao
  • Sean Nelan
  • Shouyuan Shi
  • Xiaofeng Zhu

Organizations

  • Office of Naval Research
  • University of Delaware

Tags

Fields of Study

  • Materials science

Readers

  • Microwave Engineering.
  • Thin Film Deposition Science.