Phase modulation using a titanium dioxide strip on lithium niobate
Abstract
In this manuscript, we demonstrate the first phase modulator using titanium dioxide as a strip loaded waveguide on thin-film lithium niobate. The amorphous titanium dioxide was fabricated using RF reactive sputtering followed by a dielectric lift-off process. Two gold electrodes were deposited next to the waveguide by using the same process. This process eliminates the need for plasma etching or high-temperature vapor deposition methods, opening the door to fabrication on sensitive material systems. A propagation loss of 0.156 dB/mm and V π of 3.2 V at 1550 nm were experimentally measured and reported.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2022
- Source ID
- 10.1364/ome.465698
Entities
People
- Andrew J. Mercante
- Benjamin Shopp
- Dennis W. Prather
- Peng Yao
- Sean Nelan
- Shouyuan Shi
- Xiaofeng Zhu
Organizations
- Office of Naval Research
- University of Delaware