Effect of precursors on propagation loss for plasma-enhanced chemical vapor deposition of SiN_x:H waveguides

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 15, 2016
Source ID
10.1364/ome.6.002892

Entities

People

  • Andrew Starbuck
  • Andy Pomerene
  • Christopher T. Derose
  • Douglas C. Trotter
  • E Douglas
  • Patrick Mahony

Organizations

  • Air Force Research Laboratory
  • Office of Naval Research