Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 22, 2014
Source ID
10.1364/optica.1.000039

Entities

People

  • Bosheng Zhang
  • Daniel E Adams
  • Dennis F. Gardner
  • Elisabeth R. Shanblatt
  • Henry Kapteyn
  • Margaret M. Murnane
  • Matthew D. Seaberg

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • Semiconductor Research Corporation