Release-free silicon-on-insulator cavity optomechanics

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 18, 2017
Source ID
10.1364/optica.4.001147

Entities

People

  • Amir H. Safavi-Naeini
  • Christopher J. Sarabalis
  • Jeff T. Hill
  • Rishi N. Patel
  • Yanni D. Dahmani

Organizations

  • National Science Foundation
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene