General-purpose, wide field-of-view reflection imaging with a tabletop 13 nm light source

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 20, 2017
Source ID
10.1364/optica.4.001552

Entities

People

  • Charles S. Bevis
  • Christina L Porter
  • Daniel E Adams
  • Elisabeth Shanblatt
  • Galen P. Miley
  • Henry Kapteyn
  • Margaret M. Murnane
  • Michael Gerrity
  • Michael Tanksalvala
  • Robert M Karl
  • Xiaoshi Zhang

Organizations

  • Defense Advanced Research Projects Agency
  • Gordon and Betty Moore Foundation
  • National Science Foundation
  • United States Department of Defense