CMOS-foundry-based blue and violet photonics
Abstract
We demonstrate a CMOS-foundry-based S i 3 N 4 photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and 1 d B / c m waveguide propagation loss of around 405 nm.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 17, 2021
- Source ID
- 10.1364/optica.426065
Entities
People
- Chenlei Li
- Hyundai Park
- Joel Guo
- John E. Bowers
- Lin Chang
- Minh A. Tran
- Theodore J. Morin
- Tin Komljenović
- Warren Jin
Organizations
- Defense Advanced Research Projects Agency
- University of California