On-demand terahertz surface wave generation with microelectromechanical-system-based metasurface

Abstract

During the past decade, metasurfaces have shown great potential to complement standard optics, providing novel pathways to control the phase, amplitude, and polarization of electromagnetic waves utilizing arrays of subwavelength resonators. We present dynamic surface wave (SW) switching at terahertz frequencies utilizing a mechanically reconfigurable metasurface. Our metasurface is based on a microelectromechanical system (MEMS) consisting of an array of micro-cantilever structures, enabling dynamic tuning between a plane wave (PW) and a SW for normal incidence terahertz radiation. This is realized using line-by-line voltage control of the cantilever displacements to achieve full-span ( 2 π ) phase control. Full-wave electromagnetic simulations and terahertz time-domain spectroscopy agree with coupled mode theory, which was employed to design the metasurface device. A conversion efficiency of nearly 60% has been achieved upon switching between the PW and SW configurations. Moreover, a nearly 100 GHz working bandwidth is demonstrated. The MEMS-based control modality we demonstrate can be used for numerous applications, including but not limited to terahertz multifunctional metasurface devices for spatial light modulation, dynamic beam steering, focusing, and beam combining, which are crucial for future “beyond 5G” communication systems.

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 22, 2021
Source ID
10.1364/optica.444999

Entities

People

  • Chunxu Chen
  • Kelson Kaj
  • Richard D. Averitt
  • Xiaoguang Zhao
  • Xin Zhang
  • Yuwei Huang

Organizations

  • Army Research Office
  • Boston University
  • Division of Electrical, Communications & Cyber Systems
  • Tsinghua University
  • University of California

Tags

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Phased Array Antenna Design.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • 5G
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems