High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
Abstract
Ptychographic coherent diffractive imaging enables diffraction-limited imaging of nanoscale structures at extreme ultraviolet and x-ray wavelengths, where high-quality image-forming optics are not available. However, its reliance on a set of diverse diffraction patterns makes it challenging to use ptychography to image highly periodic samples, limiting its application to defect inspection for electronic and photonic devices. Here, we use a vortex high harmonic light beam driven by a laser carrying orbital angular momentum to implement extreme ultraviolet ptychographic imaging of highly periodic samples with high fidelity and reliability. We also demonstrate, for the first time to our knowledge, ptychographic imaging of an isolated, near-diffraction-limited defect in an otherwise periodic sample using vortex high harmonic beams. This enhanced metrology technique can enable high-fidelity imaging and inspection of highly periodic structures for next-generation nano, energy, photonic, and quantum devices.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 20, 2023
- Source ID
- 10.1364/optica.498619
Entities
People
- Bin Wang
- Henry Kapteyn
- Iona Binnie
- Margaret M. Murnane
- Michael Tanksalvala
- Nathan J. Brooks
- Nicholas W. Jenkins
- Peter Johnsen
- Yuka Esashi
Organizations
- Defense Advanced Research Projects Agency
- Gordon and Betty Moore Foundation
- National Science Foundation
- University of Colorado Boulder