Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 20, 2018
Source ID
10.1364/optica.5.000884

Entities

People

  • Arslan S. Raja
  • Bahareh Ghadiani
  • Junqiu Liu
  • Martin H. P. Pfeiffer
  • Tiago Morais
  • Tobias Kippenberg

Organizations

  • Defense Advanced Research Projects Agency
  • Swiss National Science Foundation