Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 12, 2018
Source ID
10.1557/mrc.2018.70

Entities

People

  • Anne L. Alter
  • David B. Heinz
  • Dongsuk D. Shin
  • Ian B. Flader
  • Lizmarie Comenencia Ortiz
  • Thomas W. Kenny
  • W. Kenny Thomas
  • Yunhan Chen

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation