Process and characterization of ohmic contacts for beta-phase gallium oxide

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 30, 2021
Source ID
10.1557/s43578-021-00334-y

Entities

People

  • Ming‐Hsun Lee
  • Rebecca L Peterson

Organizations

  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics