MOCVD growth of (010) β-(AlxGa1−x)2O3 thin films
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 30, 2021
- Source ID
- 10.1557/s43578-021-00354-8
Entities
People
- A F M Anhar Uddin Bhuiyan
- Hongping Zhao
- Lingyu Meng
- Zixuan Feng
Organizations
- Air Force Office of Scientific Research
- National Science Foundation
- Semiconductor Research Corporation