Strain states and relaxation for $$\alpha$$-(Al$$_x$$Ga$$_{1-x}$$)$$_2$$O$$_3$$ thin films on prismatic planes of $$\alpha$$-Al$$_2$$O$$_3$$ in the full composition range: Fundamental difference of a- and m-epitaxial planes in the manifestation of shear strain and lattice tilt

Abstract

Pseudomorphic and relaxed $$\alpha$$ α -(Al$$_x$$ x Ga$$_{1-x}$$ 1 - x )$$_2$$ 2 O$$_3$$ 3 thin films are grown by combinatorial pulsed laser deposition in the entire composition range on prismatic a- and m-plane $$\alpha$$ α -Al$$_2$$ 2 O$$_3$$ 3 substrates. Pseudomorphic growth on m-plane sapphire has been achieved for $$x \ge 0.45$$ x ≥ 0.45 . A distinct difference between the a- and m-epitaxial plane is observed in reciprocal space map measurements being in agreement with continuum elasticity theory for rhombohedral heterostructures. While pseudomorphic layers on m-plane sapphire show a pronounced shear strain $$e'_5$$ e 5 ′ along the c-axis direction, relaxed layers exhibit a global lattice tilt in the same direction. Both effects are not present on the a-epitaxial plane. Out-of-plane lattice constants as well as $$e'_5$$ e 5 ′ are modeled as function of x employing elasticity theory, confirming theoretical values of the elastic stiffness tensor for $$\alpha$$ α -Ga$$_2$$ 2 O$$_3$$ 3 , especially the non-zero value of the $$C_{14}$$ C 14 component. Possible pyramidal slip systems for strain relaxation in c-axis direction are examined to explain and numerically model the difference in lattice tilt for the two substrate orientations.

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 22, 2021
Source ID
10.1557/s43578-021-00375-3

Entities

People

  • Daniel Splith
  • Holger von Wenckstern
  • M Lorenz
  • Marius Grundmann
  • Max Kneiß
  • Norbert Koch
  • Thorsten Schultz

Organizations

  • European Social Fund Plus
  • Leipzig University

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Space