Nanosecond laser writing of straight and curved waveguides in silicon with shaped beams
Abstract
The authors demonstrate a method for transverse writing of optical waveguides in a crystalline silicon wafer using a nanosecond laser with a shaped beam profile that is formed by a pair of cylindrical lenses. In contrast to traditional writing methods, this method avoids forming asymmetric waveguide profiles. Both straight and curved waveguides are written with a nearly circular transverse guide profile and are found to support single-mode propagation for 1550 nm wavelength light. The propagation loss for this wavelength is also measured.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 04, 2020
- Source ID
- 10.2351/1.5139973
Entities
People
- Brett Depaola
- Hongyu Shi
- Lianjie Xue
- Matthew J. Berg
- Pingping Chen
- Shuting Lei
- Xiaoming Yu
- Xinya Wang
- Xuefeng Chang
Organizations
- Air Force Office of Scientific Research
- Kansas State University
- National Science Foundation
- University of Central Florida
- Xiamen University of Technology