Process for Growth of Group-IV Alloys Containing Tin by Remote Plasma Enhanced Chemical Vapor Deposition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 18, 2020
- Source ID
- 10.3389/fmats.2020.00044
Entities
People
- Arnold Kiefer
- B. Claflin
- Gordon Grzybowski
- Morgan E Ware
- S. Zollner
Organizations
- Air Force Office of Scientific Research